IF-SensorR25

Robust 3D measurement in production

IF-SensorR25 is a solid optical 3D measurement instrument for automated form and roughness measurement in production. The sensor is integrated into a production line and delivers high resolution, repeatable and traceable results when measuring surface characteristics in the μm or sub-μm range. Therefore, the IF-SensorR25 is a platform that enables the use of the same measurement process both in-line and in ameasurement
laboratory. Standardized interfaces (e.g. QDAS) support an easy and quick integration into production allowing comparable measurements. In combination with a collaborative 6-axis robot, IF-SensorR25 is used as a collaborative system – “Cobot” – for flexible quality assurance and the measurement of microstructures on large components.

Technical specifications

Measurement principle non-contact, optical, three-dimensional, based on Focus-Variation
Positioning volume (Z) 25 mm (mot.)
Objective magnification   10x 20x 50x 2xSX 5xAX 10xAX 20xAX 50xSX
Working distance mm 17.5 16 10.1 34 34 33.5 20 13
Lateral measurement range (X,Y)
(X x Y)
mm
mm²
2
4
1
1
0.4
0.16
10
100
3.61
13.03
2
4
1
1
0.4
0.16
Vertical resolution nm 100 50 20 3500 460 130 70 45
Height step accuracy (1 mm) % 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1
Min. measurable roughness (Ra) µm 0.3 0.15 0.08 n.a. n.a. 0.45 0.25 0.15
Min. measurable roughness (Sa) µm 0.15 0.075 0.05 n.a. n.a. 0.25 0.1 0.08
Min. measurable radius µm 5 3 2 20 10 5 3 2

All the technical specifications can be found in the product info.

High measuring point density

Up to 500 million measurement points ensure a meticulously detailed measurement with tolerances in the μm and sub-μm range along with large working distance. The high measurement point density of Focus-Variation enables operators to gain a consistently high lateral and vertical resolution across high measurement volumes.

Measurement of steep flanks

Light coming from different directions is used to positively influence a measurement. The measurement of the maximum flank angle is not restricted by the numerical aperture of an objective. Depending on the surface users measure surfaces with slope angles up to 87°.

Varying surface reflections

SmartFlash allows high resolution measurements of materials with varying surface characteristics or reflectivity. Modulated light provides optimal illumination throughout the whole measurement area. Users measure
glossy, ground, rough, reflective and diffuse components.

The Focus-Variation

Alicona measurement systems are based on the technology of Focus-Variation and combine the functionalities of a surface roughness measurement device and a form measurement system. Each Alicona measurement instrument is a surface measurement device, surface roughness measurement system, 3D measurement system for geometrical tolerancing and micro coordinate measurement system. The Focus-Variation technology combines the small depth of focus of an optical system with vertical scanning to provide topographical and color information from the variation of focus. The main component of the system is a precision optics containing various lens systems that can be equipped with different objectives, allowing measurements with different resolution.